Method of producing a radiation-emitting component and radiation-emitting component
AssigneeOSRAM Opto Semiconductors GmbH
InventorAndreas Rückerl
Life of this patent
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Abstract
A method of producing a radiation-emitting component includes: A) providing a dielectric layer that degrades against environmental influences; B) applying a first protective layer to the dielectric layer by an atomic layer deposition method, wherein the first protective layer includes elemental Si or in a compound; and C) applying a second protective layer to the first protective layer, the second protective layer including elemental Si, wherein a layer thickness of the first protective layer is less than or equal to 1 nm so that the first protective layer reduces or prevents a degradation of the dielectric layer.
Claims17
1-15. (canceled)
A method of producing a radiation-emitting component comprising:
- A) providing a dielectric layer that degrades against environmental influences,
- B) applying a first protective layer to the dielectric layer by an atomic layer deposition method,
- wherein the first protective layer comprises elemental Si or in a compound, and
- C) applying a second protective layer to the first protective layer, the second protective layer comprising elemental Si,
- wherein a layer thickness of the first protective layer is less than or equal to 1 nm so that the first protective layer reduces or prevents a degradation of the dielectric layer.
A radiation-emitting component comprising
- a dielectric layer comprising aluminum oxide, and
- a first protective layer arranged on the dielectric layer and configured to encapsulate the dielectric layer against environmental influences,
- wherein at least one of the dielectric layer and the first protective layer is produced by an atomic layer deposition method,
- the first protective layer comprises elemental Si or in a compound,
- a layer thickness of the first protective layer is less than or equal to 1 nm so that the first protective layer reduces or prevents a degradation of the dielectric layer, and
- a second protective layer is applied to the first protective layer and the second protective layer comprises elemental Si.
A method of producing a radiation-emitting component comprising:
- A) providing a dielectric layer that degrades against environmental influences, and
- B) applying a first protective layer to the dielectric layer by an atomic layer deposition method,
- wherein the first protective layer comprises elemental Si or in a compound, and
- a layer thickness of the first protective layer is less than or equal to 1 nm so that the first protective layer reduces or prevents degradation of the dielectric layer.
Dependencies are inferred from the claim text.