Multi-state transistor devices with multiple threshold voltage channels
AssigneeInternational Business Machines Corporation
InventorsKo-Tao Lee, Pierce I-Jen Chuang, Cheng-Wei Cheng, Seyoung Kim
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AssigneeInternational Business Machines Corporation
InventorsKo-Tao Lee, Pierce I-Jen Chuang, Cheng-Wei Cheng, Seyoung Kim
Estimating the term…
A method of forming a multi-state nanosheet transistor device is provided. The method includes forming an alternating sequence of sacrificial layer segments and differentially doped nanosheet layer segments on a substrate, wherein each of the differentially doped nanosheet layer segments has a different dopant concentration from the other differentially doped nanosheet layer segments. The method further includes forming a source/drain on each of opposite ends of the sacrificial layer segments and differentially doped nanosheet layer segments, and removing the sacrificial layer segments. The method further includes depositing a gate dielectric layer on the differentially doped nanosheet layer segments, and forming a gate electrode on the gate dielectric layer to form a common gate-all-around structure, where each of the differentially doped nanosheet layer segments conducts current at a different threshold voltage.
A method of forming a multi-state nanosheet transistor device, comprising:
A multi-state nanosheet transistor device, comprising:
A multi-state fin field effect transistor device, comprising:
Dependencies are inferred from the claim text.