Transistor having wrap-around source/drain contacts
AssigneeInternational Business Machines Corporation
InventorsZhenxing Bi, Kangguo Cheng, Juntao Li, Peng Xu
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AssigneeInternational Business Machines Corporation
InventorsZhenxing Bi, Kangguo Cheng, Juntao Li, Peng Xu
Estimating the term…
Embodiments of the invention are directed to a method of forming a semiconductor device. A non-limiting example of the method includes performing fabrication operations to form a field effect transistor (FET) device on a substrate. The fabrication operations include forming a channel region over the substrate, forming a bottom conductive layer of a wrap-around source or drain (S/D) contact over the substrate, and forming a S/D region over the bottom conductive layer and adjacent to the channel region. The S/D region is communicatively coupled to the channel region and the bottom conductive layer.
A method of forming a semiconductor device, the method comprising:
A field effect transistor (FET) device comprising:
Dependencies are inferred from the claim text.