Semiconductor device and manufacturing method of semiconductor device
AssigneeSony Semiconductor Solutions Corporation
InventorTAKAYUKI ENOMOTO
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AssigneeSony Semiconductor Solutions Corporation
InventorTAKAYUKI ENOMOTO
Estimating the term…
The present technology reduces influence of a crystal defect which has occurred on a semiconductor substrate in the vicinity of an element isolation region. A semiconductor device includes a semiconductor element region, an element isolation region and a high-concentration impurity region. The semiconductor element region is disposed on a surface of the semiconductor substrate. An element isolation region is formed in a predetermined depth from the surface of the semiconductor substrate and isolates the semiconductor element region. The high-concentration impurity region is constituted to have impurity concentration higher than impurity concentration of the semiconductor substrate, is disposed between the semiconductor element region and the element isolation region, and is not disposed below the element isolation region.
A semiconductor device comprising:
A manufacturing method of a semiconductor device, comprising:
Dependencies are inferred from the claim text.