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US 2020/0286795 A1Published application
Method and Device for Monitoring Dicing Tape Tension
AssigneeInfineon Technologies AG
InventorsWalter Leitgeb, Daniel Brunner, Lukas Ferlan
Life of this patent
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Abstract
A method of monitoring a dicing tape tension is described. The method includes acquiring tension data indicative of the dicing tape tension by automated optical inspection of a dicing tape.
Claims20
A method of monitoring a dicing tape tension, the method comprising:
- acquiring tension data indicative of the dicing tape tension by automated optical inspection of a dicing tape.
A device for monitoring a dicing tape tension, the device comprising:
- an optical sensor configured to acquire tension data indicative of the dicing tape tension by automated optical inspection of a dicing tape.
A computer program product comprising a non-transitory computer readable medium storing a computer program operable to monitor a dicing tape tension, the computer program comprising:
- program instructions to acquire tension data indicative of the dicing tape tension by automated optical inspection of a dicing tape.
Dependencies are inferred from the claim text.