Electrostatic chuck

An electrostatic chuck, comprising:

• a ceramic dielectric substrate having a first major surface placing a suction object, a second major surface on an opposite side to the first major surface, and a through hole provided from the second major surface to the first major surface;
• a base plate supporting the ceramic dielectric substrate and including a gas introduction path communicating with the through hole, the base plate being made of a metal;
• and
• a porous part provided in the gas introduction path,
• the porous part including a plurality of sparse portions including a plurality of pores and a dense portion having a density higher than a density of the sparse portions,
• each of the plurality of sparse portions extending in a first direction from the base plate toward the ceramic dielectric substrate,
• the dense portion being positioned between the plurality of sparse portions,
• the sparse portions including the pores and a wall portion provided between the pores, and
• a minimum value of a dimension of the wall portion being smaller than a minimum value of a dimension of the dense portion in a second direction substantially perpendicular to the first direction.