US 2020/0286761 A1Published application

Substrate storage container

AssigneeShin-Etsu Polymer Co., Ltd.

InventorsKazumasa ONUKI, Hiroshi MIMURA, Junya TODA, Takashi SUDA

Life of this patent

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Abstract

A substrate storage container includes a container main body having an opening at the front, a support portion for supporting a substrate in the interior thereof, and a substrate receiving portion positioned more toward a rear wall than the support portion, an a lid on which a substrate pressing portion for pressing the substrate is formed. The substrate receiving portion and the substrate pressing portion are present within a range of greater than or equal to 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front.

Claims5

Dependent claims

A substrate storage container, comprising:

a container main body having an opening at a front side, a support portion for supporting a substrate in the interior thereof, a substrate receiving portion located more toward the side of a rear wall side than the support portion;
and
a lid having a pressing member with a substrate pressing portion for pressing the substrate;
the substrate storage container supporting the substrate by lifting the substrate from the support portion with the substrate pressing portion and the substrate receiving portion when the lid is attached to the container main body, and supporting the substrate with the support portion when the lid is removed from the container main body;
the substrate receiving portion and the substrate pressing portion being present within a range of greater than or equal to 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front;
and
a position corresponding to the center of the substrate when the substrate is stored in the substrate storage container being designated as the center of the container main body.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 16/763,990Filed 1 Oct 2018
Priority: JP 2017-22112616 Nov 2017
Published: 10 Sep 2020
Term ends: Not estimatedThe source records don’t support an estimate.

Classification11 codes

H10P 72/1921
Closed carriers: characterised by substrate supports
B65D 85/30
Containers, packaging elements or packages, specially adapted for particular articles or materials: for articles particularly sensitive to damage…
H10P 72/14
Using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]: vertical carrier comprising wall type elements whereby the…
H10P 72/18
Using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]: characterised by being specially adapted for supporting a…

Family

US 11,735,449 B2Related patent
US 2020/0286761 A1This patent

From the US filing history. Foreign family members aren’t listed.

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