Gas permeable superstrate and methods of using the same

A method of planarization, comprising:

• dispensing a planarization precursor material over a substrate, wherein the substrate includes a non-uniform surface topography;
• contacting the planarization precursor material with a superstrate, wherein the superstrate comprises:
• a body, wherein the body comprises a contact surface;
• and
• an amorphous fluoropolymer layer on the contact surface of the body, wherein the amorphous fluoropolymer layer is permeable to gases having an atomic mass greater than 4;
• and
• curing the planarization precursor material to form a planarization layer over the substrate, wherein curing is performed while the superstrate is contacting the planarization precursor material.

A method of manufacturing an article, comprising:

• depositing a formable material on a substrate;
• contacting the formable material on the substrate with a superstrate to form a planar layer, wherein the superstrate comprises:
• a body, wherein the body comprises a contact surface;
• and
• an amorphous fluoropolymer layer on the contact surface of the body, wherein the amorphous fluoropolymer layer is permeable to gases having an atomic mass greater than 4;
• separating the superstrate and the planar layer on the substrate;
• processing the substrate on which the planar layer has been formed;
• and
• manufacturing the article from the processed substrate.