Substrate carrier apparatus, substrate processing apparatus, and method of adjusting temperature of susceptor
AssigneeASM IP Holding B.V.
InventorKazuhiro NISHIWAKI
Life of this patent
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Abstract
Examples of a substrate processing apparatus includes a substrate carrier apparatus including a shaft, at least one carrier arm that is fixed to the shaft and rotates as the shaft rotates, and at least one thermometer fixed to the carrier arm, a susceptor, a heater that heats the susceptor, a temperature regulator that controls the heater, and a control unit that acquires a measured temperature, which is a surface temperature, of the susceptor obtained by the thermometer by bringing the carrier arm close to the susceptor and control the temperature regulator.
Claims20
A substrate carrier apparatus, comprising:
- a shaft;
- at least one carrier arm that is fixed to the shaft and being configured to rotate as the shaft rotates;
- and
- at least one thermometer fixed to the carrier arm.
A substrate processing apparatus, comprising:
- a substrate carrier apparatus including a shaft, at least one carrier arm that is fixed to the shaft and being configured to rotate as the shaft rotates, and at least one thermometer fixed to the carrier arm;
- a susceptor;
- a heater being configured to heat the susceptor;
- a temperature regulator being configured to control the heater;
- and
- a control unit being configured to acquire a measured temperature, which is a surface temperature, of the susceptor obtained by the thermometer and control the temperature regulator.
A method of adjusting a temperature of a susceptor, comprising:
- measuring a surface temperature of the susceptor with at least one thermometer fixed to a carrier arm;
- and
- modifying a detail of a control of a heater that heats the susceptor to reduce a difference between a measured temperature obtained by the thermometer and a target temperature.
Dependencies are inferred from the claim text.