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US 2020/0286710 A1Published application
Dynamic determination of a sample inspection recipe of charged particle beam inspection
AssigneeASML Netherlands B.V.
InventorsZhong-wei CHEN, Jack JAU, Wei FANG, Chiyan KUAN
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Abstract
Disclosed herein is a method comprising: determining parameters of a recipe of charged particle beam inspection of a region on a sample, based on a second set of characteristics of the sample; inspecting the region using the recipe.
Claims15
A method comprising:
- identifying a region based on a first set of characteristics of a sample, wherein the first set of characteristics comprises characteristics of a process by which patterns in the region are formed, wherein the identifying the region comprises comparing the characteristics of the process and process windows of the patterns;
- and
- determining parameters of a recipe of charged particle beam inspection of the region on the sample, based on a second set of characteristics of the sample;
- and
- inspecting the region using the recipe.
2 more elements
A method comprising:
- identifying a region based on a first set of characteristics of a sample, wherein the first set of characteristics comprises characteristics of the process by which the patterns in the region are formed
- wherein the identifying the region comprises obtaining a simulation result by simulating the patterns based on the design and the characteristics of the process;
- and
- determining parameters of a recipe of charged particle beam inspection of the region on the sample, based on a second set of characteristics of the sample and
- inspecting the region using the recipe.
2 more elements
Dependencies are inferred from the claim text.