Microactuator, head suspension assembly and disk device
AssigneesKabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
InventorHirofumi Nesori
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AssigneesKabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
InventorHirofumi Nesori
Estimating the term…
According to one embodiment, a microactuator includes a wiring substrate, and a piezoelectric element connected to first and second connecting pads of the wiring substrate. The piezoelectric element includes a piezoelectric substrate, and a first electrode and a second electrode provided on surfaces of the piezoelectric substrate. The first electrode includes a first electrode portion on an end portion on a first main surface. The second electrode includes a fifth electrode portion having an electrode end which faces the first electrode portion across a gap and provided on the first main surface. The piezoelectric element includes a protective insulating layer covering at lease an end portion of the fifth electrode including the electrode end.
A microactuator comprising:
Dependencies are inferred from the claim text.