Method and apparatus for obtaining matching process results among multiple reaction chambers

A matching apparatus for multiple reaction chambers, comprising:

• a selection device, configured to select one processing factor, the processing factor having a target value and a real value corresponding to each of the reaction chamber;
• a setting device, configured to set an adjustment coefficient for the factor for each of the reaction chambers, the adjustment coefficient being based on the real value and the target value of the factor being within a preset accuracy range when the corresponding reaction chamber operates a process;
• and
• a matching device, configured to obtain an input value of the factor to enter into each reaction chamber based on the target value of the factor and the adjustment coefficient corresponding to each of the reaction chambers.