Enclosed-channel reactor system with conduit plate

An enclosed-channel reactor system, comprising:

• a reactor body disposed with a plurality of enclosed channels;
• an upper cap disposed at one end of the reactor body, and having an inlet port communicating with the plurality of enclosed channels;
• a lower cap disposed at the other end of the reactor body and opposite to the upper cap, and having an outlet port communicating with the plurality of enclosed channels;
• at least two O-rings disposed between the reactor body and the upper cap and between the reactor body and the lower cap, respectively, for enhancing a sealing tightness;
• a first conduit plate disposed between the upper cap and the reactor body;
• and
• a convergence plate disposed between the upper cap and the first conduit plate for guiding a precursor injected from the inlet port into the first conduit plate and the plurality of enclosed channels uniformly,
• wherein the first conduit plate comprises:
• a first plate body having a first upper surface and a first lower surface opposite to the first upper surface;
• a plurality of first through holes penetrating the first upper surface and the first lower surface of the first plate body;
• and
• a plurality of first conduits concavely formed on the first upper surface of the first plate body,
• wherein the convergence plate comprises:
• a convergence plate body having an upper surface and a lower surface opposite to the upper surface;
• a convergence through hole positioned at a center of the convergence plate body and penetrating the upper surface and the lower surface of the convergence plate body in an axial direction;
• and
• at least two or more convergence conduits communicating with the convergence through hole and formed on the upper surface of the convergence plate body of the convergence plate extending linearly from an edge of the convergence plate to the convergence through hole in a lateral direction,
• wherein the convergence through hole and the convergence conduits of the convergence plate communicate with the inlet port of the upper cap and the first through holes and the first conduits of the first conduit plate, and the axial direction is perpendicular to the lateral direction, and
• wherein the convergence conduits on the upper surface of the convergence plate body of the convergence plate corresponds in position to the inlet port of the upper cap, and the inlet port is opened in a direction parallel to an axial direction of the upper cap.