Manufacturing method of a piezoelectric microphone with pillar structure

Production method of a microphone, wherein the microphone (100) comprises:

• a film of piezoelectric material;
• a lower electrode disposed on a lower side of the piezoelectric film;
• a patterned upper electrode comprising pads disposed on an upper side of the piezoelectric film;
• pillars disposed on the pads of the patterned electrode;
• a rigid dish disposed on said pillars;
• said method comprising the following steps:
• making of the patterned upper electrode by means of a first deposition of conductive material on an upper side of the piezoelectric film in such a way to form the pads of the patterned electrode;
• and
• making of the pillars by means of successive depositions of rigid material, in aligned position on the pads of the patterned electrode,
• wherein said first deposition and said successive depositions are made by means of screen-printing, dispenser-printing or spray-coating of material in liquid or semifluid state.