Substrate holder and plating apparatus with substrate holder
AssigneeEbara Corporation
InventorsShoichiro Ogata, Matsutaro Miyamoto
Life of this patent
Estimating the term…
Abstract
A substrate holder prevents a substrate to be bent or damaged owing to inward declining of a seal lip. The substrate holder with an opening includes a seal, and a seal support which has a seal support surface, and is formed on an outer circumference of the opening. The seal includes a seal body and a seal lip. At least a part of the seal support surface has an inclination angle that allows an inner end of the seal support surface to approach the plane on which the substrate is to be positioned. The inner end of the seal support surface is positioned on an inner side than the seal lip.
Claims15
A substrate holder including an opening for exposing at least a part of a substrate on at least one of surfaces, comprising:
- a seal which comes in contact with a surface including a part of the substrate to be exposed, and is pressed in a direction perpendicular to a plane on which the substrate is to be positioned;
- and
- a seal support which has a seal support surface for supporting the seal, and is disposed on an outer circumference of the opening, wherein:
- the seal includes a seal body which comes in contact with the seal support surface, and a seal lip which extends from the seal body to come in contact with the surface of the substrate to be exposed;
- at least a part of the seal support surface has an inclination angle which allows an inner end of the seal support surface to approach the plane on which the substrate is to be positioned;
- and
- the inner end of the seal support surface is positioned on an inner side than the seal lip.
A substrate holder including a polygonal opening for exposing at least a part of a substrate on at least one of surfaces, comprising:
- a seal which comes in contact with a surface that includes a part of the substrate to be exposed, and is pressed in a direction perpendicular to a plane on which the substrate is to be positioned;
- and
- a seal support disposed on an outer circumference of the opening, wherein:
- the seal includes a seal body which comes in contact with the seal support surface, and a seal lip which extends from the seal body to come in contact with the surface of the substrate to be exposed;
- and
- (a) the seal lip around a side section of the opening extends to an outer side than the seal lip around an angular section of the opening, or
- (b) the seal lip on the side section of the opening is higher than the seal lip on the angular section of the opening.
Dependencies are inferred from the claim text.