Direct-structurable formulations based on metal oxide precursors for producing oxidic layers

Abstract

The invention relates to direct-structurable coating compositions comprising a metal oxide precursor, a photoacid generator, and a solvent. The present invention also relates to the use of such a coating composition to produce directly structured metal oxide layers, a method for producing metal oxide layers using such a coating composition, a metal oxide-containing layer produced according to such a method, and the use of such a metal oxide-containing layer to produce electronic components, in particular to produce transistors, diodes, sensors or solar cells.

Dependencies are inferred from the claim text.