Piezoelectric acoustic mems transducer and fabrication method thereof

An electronic device comprising:

• a body of semiconductor material having a first cavity and a first peripheral area surrounding the first cavity;
• a first piezoelectric MEMS transducer that includes:
• a first plurality of beams extending over the first cavity and each having a first end and a second end, the first ends of the beams being coupled to the first peripheral area of the body and the second ends extending over the first cavity, the first plurality of beams including first and second beams aligned with one another along a first line and extending from first and second portions of the first peripheral area that are opposite to each other, and third and fourth beams aligned with one another along a second line and extending from third and fourth portions of the first peripheral area that are opposite to each other, the first and second lines being transverse to each other;
• a first pillar positioned at a central axis of the first cavity and connected to the second ends of the beams of the first plurality of beams;
• and
• a first membrane extending from the first pillar transversely to the central axis and underneath the first plurality of beams;
• and
• a first plurality of piezoelectric sensing elements arranged on the first plurality of beams;
• a signal-processing block coupled to the first piezoelectric MEMS transducer;
• and
• a microprocessor coupled to the signal-processing block.

A piezoelectric MEMS transducer, comprising:

• a body of semiconductor material having a central cavity and a peripheral area surrounding the central cavity;
• a plurality of beams extending over the central cavity and each having a first end and a second end, the first ends of the beams being coupled to the peripheral area of the body and the second ends extending over the central cavity, the plurality of beams including first and second beams aligned with one another along a first line and extending from first and second portions of the peripheral area that are opposite to each other, and third and fourth beams aligned with one another along a second line and extending from third and fourth portions of the peripheral area that are opposite to each other, the first and second lines being transverse to each other;
• a pillar positioned at a central axis of the central cavity and connected to the second ends of the beams;
• and
• a membrane extending from the pillar transversely to the central axis and underneath the plurality of beams;
• and
• a plurality of piezoelectric sensing elements arranged on the plurality of beams.