Methods for forming microwave tunable composited thin-film dielectric layer

A method of curing a polymer layer on a substrate using variable microwave frequency, comprising:

• (a) forming a first thin-film polymer layer on a substrate, the first thin-film polymer layer including:
• at least one first base dielectric material;
• and
• at least one microwave tunable material, wherein the at least one microwave tunable material is at least one of (1) a high polar additive material to speed up curing process and reduce curing temperature, (2) a microwave responsive additive at least one of electrical, mechanical, thermal, or chemical that are modified based on exposure to microwaves, or (3) non-polar materials,
• (b) applying a variable frequency microwave energy to the substrate and the first thin-film polymer layer to heat the substrate and the first thin-film polymer layer to a first temperature;
• and
• (c) adjusting the variable frequency microwave energy applied to the substrate and the first thin-film polymer layer to tune at least one material property of the first thin-film polymer layer.