Coated porous polymeric membranes
AssigneeEntegris, Inc.
InventorsJad Ali JABER, Saksatha LY, James HAMZIK, Testu KOHYAMA
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Abstract
The present disclosure provides a porous polymeric membrane that is coated with a cross -linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.
Claims20
A method of removing metal contaminants from an organic liquid used for photoresist, the method comprising:
- passing a photoresist organic liquid through a porous polymeric membrane comprising a coating:
- said coating comprises a cross-linked polymerized monomer comprising a positive charge in the organic liquid;
- and, removing metal contaminants from the organic liquid wherein the organic liquid used for photoresist has a lower concentration of the metal contaminants after passing through the porous membrane.
A porous membrane comprising:
- a coating having a cross-linked polymerized monomer;
- said polymerized monomer comprising a positive charge in an organic liquid.
A filtration device comprising:
- a first porous polymeric membrane comprising a coating having a cross-linked polymerized monomer with a positive charge in an organic liquid and a second porous polymeric membrane comprising a coating having a cross-linked polymerized monomer with a negative charge in the organic liquid.
Dependencies are inferred from the claim text.