Low voltage electron transparent pellicle
OwnerJohn Bennettinventor
Life of this patent
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OwnerJohn Bennettinventor
Estimating the term…
One or more pellicles protect a cathode, the pellicles comprised of a thin layer of material that allows electrons to pass while preventing contamination of the cathode from elements originating beyond the pellicle or contamination of an outside apparatus from elements originating on or near the cathode. The pellicle can be supported by an insulator, the insulator in turn supported by a deflecting layer. The pellicle can be maintained at a positive voltage relative to the cathode, such that a voltage gradient is created between the cathode and the pellicle that accelerates electrons emitted by the cathode away from the cathode. The pellicle is located at an appropriate distance from the cathode to allow electron transmission matching the energy of the electrons at that distance.
1-20. (canceled)
A system, comprising:
A pellicle system for an apparatus having a voltage gradient that is more positive at a point distant from a cathode, comprising one or more pellicle structures, the one or more pellicle structures allowing electrons to pass and blocking atoms and molecules;
A pellicle system for an apparatus having a voltage gradient that is more positive at a point distant from a cathode, comprising one or more pellicle structures, the one or more pellicle structures comprising a pellicle allowing electrons to pass and blocking atoms and molecules;
Dependencies are inferred from the claim text.