Hard x-ray photoelectron spectroscopy arrangement and system
AssigneeScienta Omicron AB
InventorsTomas WIELL, Cristopher LILJENBERG, Pål PALMGREN
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AssigneeScienta Omicron AB
InventorsTomas WIELL, Cristopher LILJENBERG, Pål PALMGREN
Estimating the term…
The present invention relates to a hard X-ray photoelectron spectroscopy (HAXPES) system comprising an X-ray source providing a beam of photons which is directed through the system so as to excite electrons from an illuminated sample. An X-ray tube is connected to a monochromator vacuum chamber in which a crystal is configured to monochromatize and focus the beam onto an illuminated sample. A hemispherical electron energy analyser is mounted onto the analysis chamber. An air gap is provided between the X-ray tube and the monochromator chamber, which air gap is provided with a first radiation trap to shield the ambient air from the radiation when the air gap is illuminated with X-rays from the source.
A hard X-ray photoelectron spectroscopy (HAXPES) system (100), in particular a laboratory-based system, comprising:
A system according to any one of the preceding claims, wherein the flexible bellow is designed using Pb rubber sheets of a flexibility sufficient to allow for the relative movements between the monochromator and the analysis vacuum chamber.
A system according to any one of preceding claims, wherein X-ray tube comprises an electron gun that excites liquid Ga to an energy level of above 60 kV, preferably at least 70 kV.
Dependencies are inferred from the claim text.