Auto-calibrated process independent feedforward control

Abstract

A substrate processing system to process a substrate includes a sensor to generate sensed values of a parameter of a substrate processing system. An actuator adjusts the parameter of the substrate processing system. A controller communicates with the sensor and the actuator and is configured to process a first substrate using the sensed values to adjust control values for controlling the actuator without feedforward control during a process. The sensed values are delayed and cause instability in the parameter. The controller is further configured to automatically calibrate feedforward values for processing a second substrate based on the sensed values and the control values and process the second substrate while controlling the actuator using the feedforward values.

Dependencies are inferred from the claim text.