Ordered nanoscale electric field concentrators for embedded thin film devices

A method comprising:

• depositing a first oxide material onto a first electrode to form a first oxide layer comprising a first oxide bottom surface in contact with the first electrode and an opposing first oxide top surface;
• positioning an anodic aluminum oxide template at a specified position on the first oxide top surface, the anodic aluminum oxide template comprising an anodic aluminum oxide body with a bottom template face that contacts the first oxide top surface and an opposing top template face, wherein the anodic aluminum oxide body defines a plurality of nanopores that extend through the body from the top template face to the bottom template face;
• depositing a nanostructure material comprising at least one of a metal, a metal oxide, a carbide, a nitride, an elemental semiconductor, or a compound semiconductor into at least a portion of the plurality of the nanopores and in contact with the first oxide top surface to form a plurality of solid nanostructures on the first oxide top surface, wherein each of the plurality of solid nanostructures are formed in a corresponding one of the plurality of nanopores of the anodic aluminum oxide template;
• separating the anodic aluminum oxide template from the first oxide layer and the plurality of solid metal nanostructures;
• depositing a second oxide material onto the first oxide top surface and the plurality of solid nanostructures to form a second oxide layer comprising a second oxide bottom surface in contact with the first oxide top surface and the plurality of solid nanostructures and an opposing second oxide top surface;
• and
• forming a second electrode in electrical contact with at least a portion of the second oxide top surface.