Charged particle beam system

A charged particle beam system comprising a charged particle beam device and a detection circuit connected to the charged particle beam device, wherein

• the charged particle beam device includes:
• a first antenna which has a first resonant frequency;
• and
• a second antenna which has a second resonant frequency different from the first resonant frequency, and
• the detection circuit includes:
• an amplification unit which amplifies antenna signals received by the first antenna and the second antenna;
• a first filter through which a signal of the first resonant frequency of the first antenna from the signal amplified by the amplification unit passes;
• a second filter through which a signal of the second resonant frequency of the second antenna from the signal amplified by the amplification unit passes;
• a first amplitude detection unit which detects a first amplitude of a signal after passing through the first filter;
• a second amplitude detection unit which detects a second amplitude of a signal after passing through the second filter;
• a storage unit which stores in advance a first discharge voltage pattern which is created corresponding to the first amplitude of the first antenna and the second amplitude of the second antenna when a discharge is generated in the charged particle beam device for each of a plurality of discharge positions;
• and
• a discharge position determination unit which compares an actual measured discharge voltage pattern during discharge which includes the first amplitude actually detected by the first amplitude detection unit and the second amplitude actually detected by the second amplitude detection unit with a plurality of the first discharge voltage patterns stored in advance in the storage unit for each of the discharge positions, and determines a discharge generation position where the discharge is actually generated.