Adaptive inset for wafer cassette system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChia-Yuan Chen, Hung-Jen Lu, Ming-Hsien Lee, Po-Tao Chu
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Abstract
The present disclosure, in some embodiments, relates to a wafer cassette system. The wafer cassette system includes a wafer cassette includes a first plurality of wafer slots respectively having a first width. An adaptive inset is fastened to the wafer cassette in a rigid connection. The adaptive inset includes a second plurality of wafer slots respectively having a second width that is less than the first width. The second plurality of wafer slots are configured to receive a substrate after the adaptive inset has been fastened to the wafer cassette.
Claims20
A wafer cassette system, comprising
- a wafer cassette comprising a first plurality of wafer slots respectively having a first width;
- an adaptive inset fastened to the wafer cassette in a rigid connection and having a second plurality of wafer slots respectively having a second width that is less than the first width;
- and
- wherein the second plurality of wafer slots are configured to receive a wafer after the adaptive inset has been fastened to the wafer cassette.
A wafer cassette system, comprising
- a wafer cassette comprising a first plurality of wafer slots;
- an adaptive inset fastened to the wafer cassette in a rigid connection and having a second plurality of wafer slots;
- and
- wherein the wafer cassette has an interior cavity configured to receive the adaptive inset along a first direction and wherein the adaptive inset is configured to receive a semiconductor substrate along the first direction.
A wafer cassette system, comprising
- a wafer cassette comprising a first plurality of wafer slots respectively having an unalterable first width;
- and
- an adaptive inset arranged in an interior cavity of the wafer cassette and having a second plurality of wafer slots respectively having an unalterable second width that is less than the unalterable first width.
Dependencies are inferred from the claim text.