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US 2020/0048758 A1Published application
Electron beam evaporator, coating apparatus and coating method
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorsEkkehart REINHOLD, Joerg FABER
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Abstract
In accordance with various embodiments, an electron beam evaporator can comprise the following: a tubular target; an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam; wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge.
Claims19
An electron beam evaporator, comprising:
- a tubular target;
- an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam;
- wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge.
A coating apparatus, comprising:
- a coating chamber having at least one coating region;
- at least one electron beam evaporator for coating a substrate in the coating region, the electron beam evaporator comprising:
- a tubular target;
- an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam;
- wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge.
2 more elements
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A coating method, comprising:
- producing at least one vapor source on a removal surface of a tubular target by means of at least one electron beam,
- wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge, and
- coating a substrate by means of the at least one vapor source.
Dependencies are inferred from the claim text.