Lamp cross-section for reduced coil heating
AssigneeApplied Materials, Inc.
InventorJOSEPH M. RANISH
Life of this patent
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Abstract
Embodiments of apparatus for providing radiant energy in the form of electromagnetic radiation are provided herein. In some embodiments a radiation source for electromagnetic radiation includes a tubular body formed from a material transparent to electromagnetic radiation; a filament disposed within the tubular body; and a reflective coating disposed on a portion of the tubular body to form a reflective portion, wherein the reflective portion is configured to minimize reflection of electromagnetic radiation emanating from the filament during use back to the filament.
Claims20
A radiation source for electromagnetic radiation in a substrate processing system, comprising:
- a tubular body formed from a material transparent to electromagnetic radiation, the tubular body has an upper portion with a circular cross-section and a lower portion with a non-circular cross-section;
- a filament sealed within the tubular body;
- at least one support that holds the filament in a position within the tubular body, wherein a central portion of the at least one support interacts with the filament and a plurality of contact portions of the at least one support interact with an inner surface of the tubular body, wherein radial distances of the plurality of contact portions relative to the filament vary in distance;
- and
- a reflective coating disposed on at least a portion of the lower portion of the tubular body to form a reflective portion, wherein the reflective portion is configured to direct reflections of electromagnetic radiation emanating from the filament during use away from the filament.
An apparatus for providing electromagnetic radiation in a substrate processing system, comprising:
- a circular lamp comprising a tubular body formed from a material transparent to electromagnetic radiation;
- a filament disposed within the tubular body;
- and
- a reflective coating disposed on a portion of the tubular body to form a reflective portion, wherein the reflective portion is configured to direct reflections of electromagnetic radiation emanating from the filament during use away from the filament, wherein the reflective portion of the tubular body is asymmetrical to a non-reflective portion of the tubular body, and wherein a center point of the filament forms an intersection point of an axis through the circular lamp with the reflective portion and the non-reflective portion on opposite sides of the axis.
A substrate processing system, comprising:
- a chamber enclosing a processing volume;
- a support having a substrate support surface adapted to support a substrate within the processing volume;
- a lamp array configured to direct electromagnetic radiation towards the substrate when present on the substrate support surface, wherein the lamp array has multiple lamps with each lamp having a tubular body formed from a material transparent to electromagnetic radiation, a filament disposed within the tubular body, and a reflective coating disposed on a portion of the tubular body to form a reflective portion, and wherein the reflective portion of the tubular body is configured to direct reflections of electromagnetic radiation emanating from the filament away from the filament;
- and
- a controller that interacts with the lamp array and is configured to adjust electromagnetic radiation output of each lamp individually through AC power changes.
Dependencies are inferred from the claim text.