Exposure apparatus and method of manufacturing article

A method of manufacturing an article, the method comprising:

• exposing a substrate using an exposure apparatus;
• developing the exposed substrate;
• and
• processing the developed substrate to manufacture the article,
• wherein the exposure apparatus exposes the substrate and includes:
• an optical system including a barrel and an optical element arranged in the barrel;
• and
• an adjustment unit including a heat radiator configured to radiate heat, the adjustment unit being configured to adjust imaging characteristics of the optical system by applying heat to the optical element from the heat radiator,
• wherein the heat radiator is a member including a first end portion and a second end portion on a side opposite to the first end portion and having a variation in physical properties between the first end portion and the second end portion falling within a predetermined range,
• a central portion between the first end portion and the second end portion of the heat radiator is arranged inside the barrel so as to be spaced apart from the optical element, and
• the first end portion and the second end portion of the heat radiator are arranged outside the barrel.