Euv radiation modification methods and systems
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChun-Lin Louis CHANG, Jen-Hao YEH, Tzung-Chi FU, Bo-Tsun LIU, Li-Jui CHEN, Po-Chung CHENG
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Abstract
A method and system for generating EUV light includes providing a laser beam having a Gaussian distribution. This laser beam can be then modified from a Gaussian distribution to a ring-like distribution. The modified laser beam is provided through an aperture in a collector and interfaces with a moving droplet target, which generates an extreme ultraviolet (EUV) wavelength light. The generated EUV wavelength light is provided to the collector away from the aperture. In some embodiments, a mask element may also be used to modify the laser beam to a shape.
Claims20
A method, comprising:
- providing a laser beam from a laser source;
- modifying a shape of the laser beam to form a modified laser beam, wherein the modifying the shape of the laser beam includes altering the laser beam from a Gaussian shape to a ring-like shape;
- using the modified laser beam to generate an EUV light;
- and
- reflecting the EUV light using a collector.
A method, comprising:
- providing a laser beam having a Gaussian distribution in a transverse plane;
- modifying the laser beam from a Gaussian distribution to a ring-like distribution in the transverse plane;
- providing the modified laser beam through an aperture in a collector plate;
- and
- interfacing the modified laser beam with a tin droplet, wherein the interfacing generates an extreme ultraviolet (EUV) wavelength light.
A method, comprising:
- providing a pre-pulse of a laser beam having a Gaussian distribution;
- interfacing the pre-pulse of the laser beam having the Gaussian distribution to a tip droplet;
- after providing the pre-pulse, providing a main pulse of the laser beam having a Gaussian distribution;
- modifying the main pulse of the laser beam from the Gaussian distribution to a ring-like distribution to form a modified main pulse;
- and
- generating an extreme ultraviolet (EUV) wavelength light using the modified main pulse.
Dependencies are inferred from the claim text.