Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKatsuya DAIMON, Yasumasa TANIGUCHI
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AssigneeMurata Manufacturing Co., Ltd.
InventorsKatsuya DAIMON, Yasumasa TANIGUCHI
Estimating the term…
In an acoustic wave device, an interdigital transducer electrode is disposed on a piezoelectric substrate with a reverse velocity surface having an elliptic shape, and a dielectric film is disposed to cover the interdigital transducer electrode. Assuming an electrode density (%) of the interdigital transducer electrode to be y (%) and a wavelength-normalized film thickness 100 h/λ (%) of the interdigital transducer electrode to be x (%), the wavelength-normalized film thickness x of the interdigital transducer electrode takes a value not less than x satisfying y=0.3452x2−6.0964x+36.262 depending on the electrode density of the interdigital transducer electrode.
An acoustic wave device comprising:
Dependencies are inferred from the claim text.