Electronic device including a capacitor
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Fung CHANG, Lien-Yao TSAI, Baohua NIU, Yi-Chuan TENG, Chi-Yuan SHIH
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Abstract
An electronic device includes a capacitor and a passivation layer covering the capacitor. The capacitor includes a first electrode, a dielectric layer disposed over the first electrode and a second electrode disposed over the dielectric layer. An area of the first electrode is greater than an area of the dielectric layer, and the area of the dielectric layer is greater than an area of the second electrode so that a side of the capacitor has a multi-step structure.
Claims21
An electronic device, comprising:
- a capacitor including:
- a first electrode;
- a dielectric layer disposed over the first electrode;
- and
- a second electrode disposed over the dielectric layer;
- and
- a passivation layer covering the capacitor,
- wherein an area of the first electrode is greater than an area of the dielectric layer, and the area of the dielectric layer is greater than an area of the second electrode so that a side of the capacitor has a multi-step structure.
19-20. (canceled)
An electronic device, comprising:
- a capacitor including:
- a first electrode;
- a dielectric layer disposed over the first electrode;
- a second electrode disposed over the dielectric layer;
- and
- a barrier layer disposed over the second electrode;
- a passivation layer covering the capacitor;
- and
- a conductive layer disposed over the passivation layer, and
- wherein an area of the first electrode is greater than an area of the dielectric layer, and the area of the dielectric layer is greater than an area of the second electrode so that a side of the capacitor has a multi-step structure.
An electronic device, comprising:
- a capacitor including:
- a first electrode;
- a dielectric layer disposed over the first electrode;
- and
- a second electrode disposed over the dielectric layer;
- and
- a passivation layer covering the capacitor,
- wherein an area of the first electrode is greater than an area of the dielectric layer, and the area of the dielectric layer is greater than an area of the second electrode so that a side of the capacitor has a multi-step structure, and
- a side face of the second electrode has a tapered shape.
Dependencies are inferred from the claim text.