Embedded magnetic inductor
AssigneeIntel Corporation
InventorsAndrew J. Brown, Rahul Jain, Sheng Li, Sai Vadlamani, Chong Zhang
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AssigneeIntel Corporation
InventorsAndrew J. Brown, Rahul Jain, Sheng Li, Sai Vadlamani, Chong Zhang
Estimating the term…
An apparatus and method of forming a magnetic inductor circuit. A substrate is provided and a first magnetic layer is formed in contact with one layer of the substrate. A conductive trace is formed in contact with the first magnetic layer. A sacrificial cooper layer protects the magnetic material from wet chemistry process steps. A conductive connection is formed from the conductive trace to the outside substrate, the conductive connection comprising a horizontal connection formed by in-layer plating A second magnetic layer is formed in contact with the conductive trace. Instead of a horizontal connection, a vertical conductive connection can be formed that is perpendicular to the magnetic layers, by drilling a first via in a second of the magnetic layers, forming a buildup layer, and drilling a second via through the buildup layer, where the buildup layer protects the magnetic layers from wet chemistry processes.
A semiconductor circuit comprising:
A computer processor comprising:
A method comprising:
Dependencies are inferred from the claim text.