Heat dissipation structures
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Hsiang HUANG, Chin-Chou LIU, Chin-Her CHIEN, Fong-yuan CHANG, Hui Yu LEE
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Hsiang HUANG, Chin-Chou LIU, Chin-Her CHIEN, Fong-yuan CHANG, Hui Yu LEE
Estimating the term…
The present disclosure describes heat dissipating structures that can be formed either in functional or non-functional areas of three-dimensional system on integrated chip structures. In some embodiments, the heat dissipating structures maintain an average operating temperature of memory dies or chips below about 90° C. For example, a structure includes a stack with chip layers, where each chip layer includes one or more chips and an edge portion. The structure further includes a thermal interface material disposed on the edge portion of each chip layer, a thermal interface material layer disposed over a top chip layer of the stack, and a heat sink over the thermal interface material layer.
A structure, comprising:
A method, comprising:
A structure, comprising:
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