Automated substrate holder loading device

Substrate holder loading device for automated horizontal loading of a substrate into a substrate holder inside of a clean room,

• wherein the substrate holder loading device contains a substrate holder guiding element, a drive unit, a movement mechanism, a substrate holder handling element and an opening mechanism,
• wherein the drive unit is connected to the movement mechanism,
• wherein the movement mechanism is connected to the substrate holder handling element,
• wherein the movement mechanism is adapted to transmit the propulsion from the drive unit to the substrate holder handling element to provide a rotation of the substrate holder handling element along an axis essentially parallel to a surface of the substrate,
• wherein the substrate holder handling element is adapted to rotate by about 180°,
• wherein the substrate holder handling element is adapted to reversibly fasten the substrate holder and wherein the substrate holder handling element contains the opening mechanism,
• wherein the opening mechanism is adapted to automatically open and close the substrate holder, and
• wherein the movement mechanism contains a stepping gear or wherein the drive unit is a step motor, or wherein both the movement mechanism contains a stepping gear and the drive unit is a step motor.