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US 2020/0006071 A1Published application
Thin film structure
AssigneeChunghwa Picture Tubes, Ltd.
InventorsWen-Jiunn Hsieh, Chen-Chi Lin
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Abstract
The present invention provides a thin film structure which comprises an amorphous silicon thin film and a plurality of nanoparticles. The plurality of nanoparticles are on a surface of the amorphous silicon thin film, a material of the plurality of nanoparticles includes a photothermal effect material, and therefore, the large-area crystal uniformity of the amorphous silicon thin film during melting and recrystallization can be enhanced.
Claims20
A thin film structure, comprising:
- an amorphous silicon thin film;
- and
- a plurality of nanoparticles on a surface of the amorphous silicon thin film, a material of the plurality of nanoparticles including a photothermal effect material.
Dependencies are inferred from the claim text.