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US 2020/0005445 A1Published application
Method for identifying robot arm responsible for wafer scratch
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorYen-Liang CHEN
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Abstract
In a method for identifying a robot arm responsible for creating a scratch on a wafer, at least one scratch mark on a wafer is detected. A first scratch dimension of the at least one scratch mark is determined. The determined first scratch dimension is compared to a plurality of first robot arm dimensions to generate a plurality of first comparing results, wherein the first comparing results respectively correspond to a plurality of robot arms. One of the robot arms is identified based on the first comparing results.
Claims20
A method, comprising:
- detecting at least one scratch mark on a wafer;
- determining a first scratch dimension of the at least one scratch mark;
- comparing the determined first scratch dimension to a plurality of first robot arm dimensions to generate a plurality of first comparing results, wherein the first comparing results respectively correspond to a plurality of robot arms;
- and
- identifying one of the robot arms based on the first comparing results.
2 more elements
A method, comprising:
- detecting at least one scratch mark on a wafer;
- determining a scratch orientation of the at least one scratch mark;
- comparing the determined scratch orientation to a plurality of robot arm orientations to generate a plurality of first comparing results, wherein the first comparing results respectively correspond to a plurality of robot arms;
- and
- identifying one of the robot arms based on the first comparing results.
2 more elements
A method comprising:
- reading a wafer at a first reading station;
- operating on the wafer using a plurality of robot arms after reading the wafer at the first reading station;
- reading the wafer at a second reading station after operating on the wafer using the robot arms;
- detecting a scratch mark on the wafer at the second reading station;
- comparing parameters of the scratch mark to parameters of the robot arms operating on the wafer between the first reading station and the second reading station to generate comparing results;
- and
- identifying one of the robot arms based on the comparing results.
4 more elements
Dependencies are inferred from the claim text.