Optical inspection method, optical inspection device and optical inspection system

Abstract

An optical inspection method for an optical inspection device comprising an optical lens is provided according to an embodiment of the disclosure. The optical inspection method includes: obtaining a first image of an object by the optical lens; performing an edge detection on the first image to obtain a second image comprising an edge pattern; and performing a defect inspection operation on the second image based on a neural network architecture to inspect a defect pattern in the second image. In addition, an optical inspection device and an optical inspection system are provided according to embodiments of the disclosure.

Dependencies are inferred from the claim text.