Euv light source and apparatus for lithography
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJhan-Hong YEH, Cheng-Chieh CHEN, Jeng-Yann TSAY, Li-Jui CHEN, Yee-Shian Henry TONG, Wen-Chih WANG, Hsin-Liang CHEN
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Abstract
In a method of diagnosing an RF generator of a laser produced plasma extreme ultra violet (LPP EUV) radiation source apparatus, a testing system is connected to the RF generator of the LPP EUV radiation source apparatus. An output power is measured by the testing system with changing an input power of the RF generator. Using a computer system, the measured output power is analyzed. Based on the analyzed measured output power, whether the RF generator is operating properly is determined.
Claims20
A method of diagnosing an RF generator of a laser produced plasma extreme ultra violet (LPP EUV) radiation source apparatus, the method comprising:
- connecting a testing system to the RF generator of the LPP EUV radiation source apparatus;
- measuring an output power by the testing system while changing an input power of the RF generator;
- analyzing, using a computer system, the measured output power;
- determining, based on the analyzed measured output power, whether the RF generator is operating properly.
A laser produced plasma extreme ultra violet (LPP EUV) radiation source apparatus comprising:
- a laser amplifier including a tube, a matching box and an RF generator;
- a testing system;
- and
- a control system, wherein:
- the control system is configured to, when an error related to an RF generator is detected,
- measure an output power by the testing system while changing an input power of the RF generator;
- analyze the measured output power;
- and
- determine, based on the analyzed measured output power, whether the RF generator is operating properly.
A method of error recovery of a laser produced plasma extreme ultra violet (LPP EUV) radiation source apparatus, the method comprising:
- detecting an error related to an RF generator in the LPP EUV radiation source apparatus;
- determining whether the error indicates that the RF generator is broken;
- when it is determined that the error indicates that the RF generator is broken, instructing replacement of the RF generator with a new RF generator;
- when it is determined that the error does not indicate that the RF generator is broken,
- connecting a testing system to the RF generator;
- measuring an output power by the testing system while changing an input power of the RF generator;
- analyzing, using a computer system, the measured output power;
- and
- determining, based on the analyzed measured output power, whether the RF generator is broken.
Dependencies are inferred from the claim text.