A chemically amplified positive-type photosensitive resin composition comprising an acid generator (A) which generates acid upon exposure to an irradiated active ray or radiation, a resin (B) whose solubility in alkali increases under an action of acid, and a nitrogen-containing aromatic heterocyclic compound (C), wherein
- the nitrogen-containing aromatic heterocyclic compound (C) is a compound represented by the following formula (c-a) or (c-b):
- wherein in the formula (c-a), Sub is a substituent, Ac1 is a monocyclic or condensed polycyclic nitrogen-containing aromatic heterocycle which may have a substituent other than the Sub, and two Subs may be identical to or different from each other,
- wherein in the formula (c-b), Sub is a substituent, Ac2 is a monocyclic or condensed polycyclic nitrogen-containing aromatic heterocycle which may have a substituent other than the Sub, Rc0 is a hydrogen atom or an organic group, and two Subs may be identical to or different from each other, and
- wherein a common logarithm value Log S of the solubility S of the nitrogen-containing aromatic heterocyclic compound (C) is −6.00 or less.