Measurement apparatus for measuring a wavefront aberration of an imaging optical system

A measurement apparatus for measuring a wavefront aberration of an imaging optical system comprising:

• a measurement wave generating module configured to generate a measurement wave radiated onto the optical system, wherein the measurement wave generating module comprises:
• an illumination system configured to illuminate a mask plane with an illumination radiation, and
• coherence structures arranged in the mask plane, and
• a wavefront measurement module configured to determine a measurement result after the measurement wave passes through the optical system and, with an evaluation device, to determine from the measurement result a deviation of the wavefront of the measurement wave from a desired wavefront,
• wherein the evaluation device is configured to determine an influence of an intensity distribution of the illumination radiation in a region of the mask plane on the measurement result with an optical propagation calculation and to determine the deviation of the wavefront of the measurement wave in accordance with the determined influence of the intensity distribution.