Pressure sensor device and method for manufacturing pressure sensor device

Abstract

A pressure sensor device capable of further decreasing dimensions of a pressure-sensitive element in which a semiconductor integrated circuit is integrated and increasing a spatial resolution and a method for manufacturing the pressure sensor device. A pressure sensor device includes a flexible wiring substrate and a plurality of pressure-sensitive elements in each of which a semiconductor integrated circuit is integrated. The pressure-sensitive elements are attached to one surface of the flexible wiring substrate and are electrically connected to wirings of the flexible wiring substrate. Pressure applied to the other surface of the flexible wiring substrate corresponding to an attachment position of each of the pressure-sensitive elements can be detected by a corresponding pressure-sensitive element through the flexible wiring substrate.

Dependencies are inferred from the claim text.