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US 2020/0002811 A1Published application
Temperature-controlled flange and reactor system including same
AssigneeASM IP Holding B.V.
InventorsSonti Sreeram, John Tolle, Joe Margetis, Junwei Su
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Abstract
A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.
Claims21
A flange assembly comprising:
- a flange comprising:
- a first surface for coupling to a reactor;
- an opposing second surface;
- and
- an opening between the first surface and the second surface;
- at least one heater;
- and
- at least one cooling channel.
5 more elements
A flange comprising:
- a first surface for coupling to a reactor;
- an opposing second surface;
- an opening between the first surface and the second surface;
- at least one recess to receive a heater;
- and
- at least one cooling channel.
3 more elements
Dependencies are inferred from the claim text.