Cylindrical titanium oxide sputtering target and process for manufacturing the same
AssigneeMaterion Advanced Materials Germany GmbH
InventorsMarkus Schultheis, Christoph Simons, Martin Schlott
Life of this patent
Estimating the term…
Abstract
Known cylindrical sputtering targets comprise a substrate and a target material that forms a layer on the substrate, said layer has a thickness d, wherein the target material comprises TiOx as the main component, and x is within a range of 1<x<2. Starting therefrom and in order to provide large-sized cylindrical sputtering targets with a thick target layer comprising sub-stoichiometric TiO2 it is proposed that x is within a range of 1.45<x<1.7 that allows a target layer thickness d which is larger than 10 mm.
Claims22
A cylindrical sputter target comprising a substrate and a target material that forms a layer on the substrate, said layer has a thickness d, wherein the target material comprises TiOx as the main component, and x is within a range of 1<x<2, and characterized in that d is larger than 10 mm and x is within a range of 1.45<x<1.7, wherein the target material is free from visible surface cracks, or if surface cracks exist, they have a maximum length of less than 1 cm.
(canceled)
A process for producing a sputtering target, which comprises
- (a) providing a substrate made of a metal or alloy,
- (b) providing a ceramic powder comprising a metal oxide powder of the chemical formula TiOy as the main component, whereby TiOy is deficient in oxygen as compared with the stoichiometric composition TiO2,
- (c) forming a ceramic layer on the substrate by plasma spraying, wherein said ceramic powder is made in a semi-molten state in a high temperature plasma gas in a reducing atmosphere, and it is transported and deposited onto the substrate by the plasma gas so as to obtain a target comprising a layer with a thickness d of a target material that comprises TiOx as the main component, whereby TiOx is deficient in oxygen as compared with the stoichiometric composition TiO2,
- wherein y in said metal oxide powder TiOy is within a range of 1.3<y<1.7, and wherein x in said target material TiOx is within a range of 1.45<x<1.7, and the layer thickness d is more than 10 mm.
Dependencies are inferred from the claim text.