Method of Forming an Integrated Resonator with a Mass Bias

A method of forming a resonator, comprising:

• forming a piezoelectric layer over a substrate;
• forming a dielectric structure over the piezoelectric layer;
• forming a bottom electrode between the piezoelectric layer and the substrate;
• forming a top electrode between the piezoelectric layer and the dielectric structure;
• forming a metal layer over the dielectric structure;
• and
• patterning the metal layer thereby forming a mass bias located over the piezoelectric layer and at least one contact pad electrically connected to the top electrode or the bottom electrode.

A method of forming a resonator, comprising:

• forming first and second electrode layers over a substrate;
• forming a piezoelectric layer between the first and second electrode layers;
• forming a metal layer over the second electrode layer;
• and
• patterning the metal layer thereby forming a mass bias located over the piezoelectric layer and at least one contact pad electrically connected to the first electrode or the second electrode.