X-ray inspection device and method for determining degree of consumption of target of x-ray tube in x-ray inspection device

A method for determining a degree of consumption of a target of an X-ray tube in an X-ray inspection device for determining the degree of consumption of the target, the X-ray inspection device including the X-ray tube configured to cause an electron beam to collide with the target to generate an X-ray and an X-ray detector configured to detect the X-ray having been output from the X-ray tube and having been transmitted through an inspection target object, including the step of:

• detecting the X-ray output from the X-ray tube for a predetermined period by the X-ray detector to detect an X-ray amount in the predetermined period, thereby measuring a maximum value Imax and a minimum value Imin of the X-ray amount in the predetermined period;
• calculating an X-ray amount fluctuation rate by using the maximum value Imax and the minimum value Imin of the X-ray amount;
• and
• determining the degree of consumption of the target from the X-ray amount fluctuation rate.