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US 2019/0378962 A1Published application
Semiconductor Device and Method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChen-Hua Yu, Keng-Han Lin, Hung-Jui Kuo, Hui-Jung Tsai
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Abstract
In an embodiment, a method includes: connecting a light emitting diode to a substrate; encapsulating the light emitting diode with a photosensitive encapsulant; forming a first opening through the photosensitive encapsulant adjacent the light emitting diode; and forming a conductive via in the first opening.
Claims20
A method comprising:
- connecting a light emitting diode to a substrate;
- encapsulating the light emitting diode with a photosensitive encapsulant;
- forming a first opening through the photosensitive encapsulant adjacent the light emitting diode;
- and
- forming a conductive via in the first opening.
2 more elements
A method comprising:
- connecting a first structure to an interconnect, the first structure comprising a light emitting diode extending from a carrier substrate, a first terminal of the light emitting diode being connected to the interconnect;
- removing the carrier substrate to expose the light emitting diode;
- encapsulating the light emitting diode with a photosensitive encapsulant;
- after encapsulating the light emitting diode, forming a first conductive via extending through the photosensitive encapsulant to contact the interconnect;
- and
- forming a conductive line connecting a second terminal of the light emitting diode to the first conductive via.
3 more elements
A device comprising:
- an interconnect;
- a light emitting diode connected to the interconnect;
- a photosensitive encapsulant surrounding the light emitting diode;
- a first conductive via extending through the photosensitive encapsulant, the first conductive via being electrically connected to the interconnect, the first conductive via comprising a conductive material on a seed layer, the seed layer being disposed between the conductive material and the interconnect, the seed layer further being disposed between the conductive material and the photosensitive encapsulant;
- and
- a conductive line connecting the light emitting diode to the first conductive via.
3 more elements
Dependencies are inferred from the claim text.