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US 2019/0378916 A1Published application
Method of forming a germanium oxynitride film
AssigneeASM IP Holding B.V.
InventorsFu Tang, Qi Xie, Jan Willem Maes, Xiaoqiang Jiang, Michael Eugene Givens
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Abstract
A method for forming layers suitable for a V-NAND stack is disclosed. Specifically, the method may include multiple cycles for forming an oxide and a nitride in order to form an oxynitride layer.
Claims21
1-17. (canceled)
A method of forming a germanium oxynitride film comprising:
- providing a substrate for processing in a reaction chamber;
- using a germanium precursor and an oxygen precursor, performing an oxide cycle for deposing an oxide comprising germanium onto the substrate;
- and
- before or after the performing the oxide cycle, using a germanium precursor and a nitrogen precursor, performing a nitride cycle for deposing a nitride comprising germanium onto the substrate;
- wherein the performing the oxide cycle and the performing the nitride cycle are repeated as desired in order to form the germanium oxynitride film of a desired thickness and stoichiometry, and
- wherein the oxygen precursor and the nitrogen precursor are different.
3 more elements
A method of forming a germanium oxynitride film layer for a V-NAND stack comprising:
- providing a substrate for processing in a reaction chamber;
- performing an oxide cycle for deposing an oxide onto the substrate, the performing the oxide cycle comprising:
- pulsing a germanium precursor;
- and
- pulsing an oxygen precursor;
- and
- before or after the performing the oxide cycle, performing a nitride cycle for deposing a nitride onto the substrate, the performing the nitride cycle comprising:
- pulsing a germanium precursor;
- and
- pulsing a nitrogen precursor;
- wherein the performing the oxide cycle and the performing the nitride cycle are repeated as desired in order to form the germanium oxynitride film of a desired thickness and stoichiometry, and
- wherein the oxygen precursor and the nitrogen precursor are different.
9 more elements
Dependencies are inferred from the claim text.