Contact shape engineering for improved performance in gan rf transistors
AssigneeIntel Corporation
InventorsMarko RADOSAVLJEVIC, Han Wui THEN, Sansaptak DASGUPTA, Paul FISCHER, Walid HAFEZ
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AssigneeIntel Corporation
InventorsMarko RADOSAVLJEVIC, Han Wui THEN, Sansaptak DASGUPTA, Paul FISCHER, Walid HAFEZ
Estimating the term…
Embodiments described herein comprise a transistor device that comprises a GaN channel. In an embodiment, the transistor device further comprises a source region and a drain region. The source region may be separated from the drain region by the GaN channel. In an embodiment, the source region and the drain region comprise surfaces with a root mean squared (RMS) surface roughness greater than 3 nm. In an embodiment, the transistor device further comprises a gate electrode over the GaN channel, a source contact in contact with source region, and a drain contact in contact with the drain region.
A transistor device, comprising:
A transistor device, comprising:
A transistor device, comprising:
A computing device, comprising:
Dependencies are inferred from the claim text.