A method of manufacturing a semiconductor integrated circuit device, the method comprising:
- providing a semiconductor substrate having a first conductive type;
- forming a body contact region in the semiconductor substrate, the body contact region having the first conductive type;
- forming isolation layers in the semiconductor substrate;
- forming an active well having a second conductive type in the semiconductor substrate and forming a blocking well having the second conductive type at a side of the body contact region, the active well spaced apart from the body contact region;
- and
- forming a base and an emitter in the active well between the isolation layers and forming a collector in the body contact region.