Overlay mark

An overlay mark, comprising:

• a first feature comprising a plurality of first segments extending in an X-direction;
• a second feature comprising a plurality of second segments extending in a Y-direction;
• and
• a third feature, wherein the third feature is farther from a substrate than the first feature and the second feature, and the third feature comprises:
• a plurality of third segments extending along the X-direction, wherein, in a plan view, the plurality of third segments are offset from the plurality of first segments, and
• a plurality of fourth segments extending along the Y-direction, wherein, in the plan view, the plurality of fourth segments are offset from the plurality of second segments.

An overlay mark, comprising:

• a first feature comprising a plurality of first segments extending in an X-direction;
• a second feature comprising a plurality of second segments extending in a Y-direction;
• and
• a third feature, wherein the third feature is farther from a substrate than the first feature and the second feature, and the third feature comprises:
• a plurality of third segments extending along the X-direction, wherein, in a plan view, adjacent third segments of the plurality of third segments alternate with adjacent first segments of the plurality of first segments, and
• a plurality of fourth segments extending along the Y-direction.